MELNIK I. V., TUGAY S. B.
ABSTRACT
The procedure of simulation of physical processes taking place on the cathode surface in the glow discharge electron sources is considered. Calculation of temperature on the cathode surface, and to cathode sputtering under the ions bombarding has been performed. Energy efficiency of cold cathodes, used in high voltage gas discharge electron sources, is also considered
KEYWORDS
electron-beam technologies, sources of high voltage glow discharge electron, cooling system, the secondary ion-electron emission, ion sputtering, energy efficiency cathode.
REFERENCES
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